A 45GHz AlGaAs/GaAs HBT IC technology without ion-implantation

S. J. Prasad, B. Vetanen, C. Haynes, S. Park, I. Beers, S. Diamond, G. Pubanz, J. Ebner, S. Sanielevici, A. Agoston

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A 45GHz HBT IC technology with 1.4THz Schottky diodes is described. The process is mesa isolated and implant-free. The process integrates NiCr resistors, MIM capacitors and air-bridge inductors. A divide-by-eight prescaler shows good performance up to 13.5GHz. A pulser circuit using the Schottky diodes produced a voltage pulse with 10.35ps rise time.

Original languageEnglish (US)
Title of host publicationEuropean Solid-State Device Research Conference
EditorsHerman E. Maes, Roger J. Van Overstraeten, Robert P. Mertens
PublisherIEEE Computer Society
Pages413-416
Number of pages4
ISBN (Electronic)0444894780
StatePublished - 1992
Externally publishedYes
Event22nd European Solid State Device Research Conference, ESSDERC 1992 - Leuven, Belgium
Duration: Sep 14 1992Sep 17 1992

Publication series

NameEuropean Solid-State Device Research Conference
ISSN (Print)1930-8876

Conference

Conference22nd European Solid State Device Research Conference, ESSDERC 1992
Country/TerritoryBelgium
CityLeuven
Period9/14/929/17/92

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

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