Stress-temperature behavior of electron cyclotron resonance oxides and their correlation to hydrogenous species concentration

Physics & Astronomy

• electron cyclotron resonance 100%
• oxides 56%
• temperature 27%
• quartz 22%
• cycles 8%
• nuclear reactions 6%
• integrated circuits 6%
• passivity 6%
• infrared spectroscopy 5%
• interstitials 5%
• sputtering 5%
• hysteresis 5%
• vapor deposition 5%
• oxygen 3%
• silicon 3%